منابع مشابه
Resonating Silicon Beam Force Sensor
A resonating silicon-beam force sensor is being developed using micromachining of silicon and IC-compatible processes. Results are reported here of measurements on the force-to-frequency transfer of bare silicon prototypes. The measurements with forces on the sensor beam up to 0.4 N show a frequency shift of 3.1 to 5.2 times the unloaded resonance frequency f. (fo = 3 to 5 kHz), depending on th...
متن کاملA mechanical micro molecular mass sensor
One of the bio-sensing mechanisms is mechanical. Rather than measuring shift in resonance frequency, we adopt to measure the change in spring constant due to adsorption, as one of the fundamental sensing mechanism. This study explains determination of spring constant of a surface functionalized micro machined micro cantilever, which resonates in a trapezoidal cavity-on Silicon wafer, with the ...
متن کاملA mechanical micro molecular mass sensor
One of the bio-sensing mechanisms is mechanical. Rather than measuring shift in resonance frequency, we adopt to measure the change in spring constant due to adsorption, as one of the fundamental sensing mechanism. This study explains determination of spring constant of a surface functionalized micro machined micro cantilever, which resonates in a trapezoidal cavity-on Silicon wafer, with the ...
متن کاملEnhancing the sensitivity of a micro-diaphragm resonating sensor by effectively positioning the mass on the membrane
The detection of biomarkers in the liquid phase using mechanical sensors is difficult because of noise caused by the liquid. To reduce and verify the side effects of liquid loading, we performed calculations and experiments to determine the shift in resonant frequency according to the loading conditions. A 2-μm-thick piezoelectric rectangular micro-diaphragm with a 500 × 500 μm membrane was use...
متن کاملMicro Coriolis Mass Flow Sensor for Chemical Micropropulsion Systems
We have designed a micromachined micro Coriolis flow sensor for the measurement of hydrazine (N2H4, High Purity Grade) propellant flow in micro chemical propulsion systems [1]. The sensor measures mass flow up to 6 mg/s for a single thruster or up to 24 mg/s for four thrusters. The sensor will first be used for measurement and characterization of the micro thruster system in a simulated space v...
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ژورنال
عنوان ژورنال: Sensors and Actuators A: Physical
سال: 1990
ISSN: 0924-4247
DOI: 10.1016/0924-4247(90)85066-d